Integrated Modeling and Control of Electrostatic MEMS, Part I: Modeling

We present an integrated approach to modeling and control of electrostatically-actuated MEMS. The model consists of a set of fixed or movable electrodes, each coupled to the others through a resistor and capacitance, and to ground through a capacitance and a voltage or current source. This formulation incorporates movable structures, control electrodes, sense electrodes, and parasitic capacitances. The resulting dynamic equations may be directly incorporated into a passivity-based control framework for stabilization and tracking. In this first of two parts, we demonstrate the modeling approach on a electrostatically-actuated test structure with a single movable mirror, one control and one parasitic structure.